Monosilicon Pressure Sensor

SPH19T pressure sensor adopts imported high stability mono-silicon sensor die encapsulated to SS316L base. External pressure pass stainless steel diaphragm and internal sealed silicon oil to the monosilicon sensor die. The sensor die doesn't contact the measuring medium directly, which forms to isolated structure, suitable for various liquid medium.
 

Features

• Power supply: 5-12VDC
• Electrical connection: φ0.5mm kovar pin or 100mm silicone rubber soft wire
• Common mode voltage output: 50% of input(typical)

• Diaphragm material: SUS316L, hastelloy C, Tantalum
• Bridge resistance: 6kΩ
• Respond time(10%-90%): <1ms
• Insulation resistance：500M0/500VDC
• Hysteresis: Typical: ±0.03%F.S. Max: ±0.05%F.S.
• Repeatability: Typical: ±0.03%F.S. Max: ±0.05%F.S.
• Full-scale output: Typical: 100mv Max: 100±20mV(10MPa:20-300mV)@5V
• Long-term stability: Typical: ±0.1%F.S./year Max: ±0.2%F.S./year
• Compensation temperature range: -20~85℃

Industry application

• Process control
• Environmental control
• Flow control
• Hydraulic and pneumatic equipment
 

Download

• Data sheet